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多晶硅片各点间电阻率差异大，这是什么原因呢？

2025-03-15 22:55:51

推荐回答（2个）

回答1：

从原理上讲，多晶硅片各点间电阻率有差异是正常的。
既然是多晶硅，说明其中有许多晶粒和晶界。由于晶粒的大小不统一，所以在不同的测量点范围内，包含的晶粒和晶界数量是不同的。又由于晶界的电阻率大于晶粒的电阻率，所以导致了“多晶硅片各点间电阻率差异大”。

回答2：

和参杂的浓度也有关系

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